With the development of microelectronics and micromachining technology, micro-heater has found plenty of applications in micro-sensor. Heating electrode material is one of the key factors that affect the power loss, response time, and sensitivity of a micro-heater. In this work, using two various metals, two micro-heaters with the same geometry are designed, fabricated, and characterized on silicon substrates based on the micro-electro-mechanical-system (MEMS) fabrication process. In the first micro-heater, gold, and in the second one, platinum are used as the heating electrode, and the effect of heating electrode material on the performance of the micro-heater is evaluated. Moreover, to improve the micro-heater efficiencies, their design is investigated, and the micro-heater with an optimum design is chosen. The analytical results obtained exhibit that the gold micro-hater has a lower response time and a higher power loss than the platinum micro-heater. The experimental results are in good agreement with the results obtained from the analytical analysis, and show that the fabricated micro-heaters with an optimum design have a high performance; as the power consumption and response time are 36 mW and 1.75 ms, respectively, in the gold micro-heater, and 30 mW and 2.1 ms, respectively, in the platinum micro-heater for a temperature variation from 30 to 450 oC. These results demonstrate that with fabrication of the gold micro-heater, the response time improves by 16.6% in comparison with the platinum micro-heater.