DESIGN AND FABRICATION OF OPTIMIZED GOLD MICRO-HEATER AND COMPARISON OF ITS PERFORMANCE WITH PLATINUM MICROHEATER

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SAMAEIFAR F.; AFIFI A.; ABDOLLAHI H.

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Journal: JOURNAL OF SOLID AND FLUID MECHANICS Year:2016 | Volume:6 | Issue:1 Page(s): 259-272

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Title

DESIGN AND FABRICATION OF OPTIMIZED GOLD MICRO-HEATER AND COMPARISON OF ITS PERFORMANCE WITH PLATINUM MICROHEATER

Author(s)

SAMAEIFAR F. | AFIFI A. | ABDOLLAHI H. | Issue Writer Certificate

Keywords

HEATING ELECTRODEQ1

MICRO-ELECTRO-MECHANICAL SYSTEMSQ1

MICRO-HEATERQ1

MICRO-SENSORQ1

POWER LOSSQ1

Abstract

With the development of microelectronics and micromachining technology, MICRO-HEATER has found plenty of applications in MICRO-SENSOR. HEATING ELECTRODE material is one of the key factors that affect the POWER LOSS, response time, and sensitivity of a MICRO-HEATER. In this work, using two various metals, two MICRO-HEATERs with the same geometry are designed, fabricated, and characterized on silicon substrates based on the micro-electro-mechanical-system (MEMS) fabrication process. In the first MICRO-HEATER, gold, and in the second one, platinum are used as the HEATING ELECTRODE, and the effect of HEATING ELECTRODE material on the performance of the MICRO-HEATER is evaluated. Moreover, to improve the MICRO-HEATER efficiencies, their design is investigated, and the MICRO-HEATER with an optimum design is chosen. The analytical results obtained exhibit that the gold micro-hater has a lower response time and a higher POWER LOSS than the platinum MICRO-HEATER. The experimental results are in good agreement with the results obtained from the analytical analysis, and show that the fabricated MICRO-HEATERs with an optimum design have a high performance; as the power consumption and response time are 36 mW and 1.75 ms, respectively, in the gold MICRO-HEATER, and 30 mW and 2.1 ms, respectively, in the platinum MICRO-HEATER for a temperature variation from 30 to 450 oC. These results demonstrate that with fabrication of the gold MICRO-HEATER, the response time improves by 16.6% in comparison with the platinum MICRO-HEATER.

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APA: Copy

SAMAEIFAR, F., AFIFI, A., & ABDOLLAHI, H.. (2016). DESIGN AND FABRICATION OF OPTIMIZED GOLD MICRO-HEATER AND COMPARISON OF ITS PERFORMANCE WITH PLATINUM MICROHEATER. JOURNAL OF SOLID AND FLUID MECHANICS, 6(1), 259-272. SID. https://sid.ir/paper/212802/en

Vancouver: Copy

SAMAEIFAR F., AFIFI A., ABDOLLAHI H.. DESIGN AND FABRICATION OF OPTIMIZED GOLD MICRO-HEATER AND COMPARISON OF ITS PERFORMANCE WITH PLATINUM MICROHEATER. JOURNAL OF SOLID AND FLUID MECHANICS[Internet]. 2016;6(1):259-272. Available from: https://sid.ir/paper/212802/en

IEEE: Copy

F. SAMAEIFAR, A. AFIFI, and H. ABDOLLAHI, “DESIGN AND FABRICATION OF OPTIMIZED GOLD MICRO-HEATER AND COMPARISON OF ITS PERFORMANCE WITH PLATINUM MICROHEATER,” JOURNAL OF SOLID AND FLUID MECHANICS, vol. 6, no. 1, pp. 259–272, 2016, [Online]. Available: https://sid.ir/paper/212802/en

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