THE EFFECT OF USING A THIN SILICON ISLAND UNDERNEATH THE MEMBRANE ON MEMS MICRO-HEATER PERFORMANCE

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SAMAEIFAR FATEMEH; AFIFI AHMAD; ABDOLLAHI HASAN

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Journal: Journal of Advanced Processes in Materials Engineering Year:2015 | Volume:9 | Issue:3 (34) Page(s): 93-106

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Title

THE EFFECT OF USING A THIN SILICON ISLAND UNDERNEATH THE MEMBRANE ON MEMS MICRO-HEATER PERFORMANCE

Author(s)

SAMAEIFAR FATEMEH | AFIFI AHMAD | ABDOLLAHI HASAN | Issue Writer Certificate

Keywords

MICRO-HEATERQ2

MICRO-SENSORQ2

MEMSQ2

SUSPENDED MEMBRANEQ2

UNIFORM HEAT DISTRIBUTIONQ2

Abstract

With the development of microelectronics and micromachining technology, MICRO-HEATER has found plenty of applications in MICRO-SENSOR. The sensitivity and resolution of gas sensors that use a micro-hotplate are dependent on the temperature uniformity of the sensitive device .In this work, placing a thin Si-island underneath the dielectric membrane for achieving uniform temperature distribution over the active heater area is investigated. Two micro- heaters with SUSPENDED MEMBRANE structure are designed, fabricated and characterized on the silicon substrate based on MEMS fabrication process. In the one of them, l Ourn thick silicon layer is placed unearth dielectric membrane while another one is fabricated without this layer. The simulation results show that with placing silicon layer, temperature uniformity and mechanical strength are improved whereas power consumption and response time are increased. Furthermore, Experimental results are in closed agreement with the results obtained from the simulation and show that power consumption and response time in fabricated MICRO-HEATER with thin silicon island are 50mW and 4.23ms respectively to reach a temperature of 500oC, but they in MICRO-HEATER without this layer are 13mW and 2Ams respectively to reach this temperature.

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References

طراحی و شبیه سازی میکروهیتر ساخته شده با تکنولوژی MEMS

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APA: Copy

SAMAEIFAR, FATEMEH, AFIFI, AHMAD, & ABDOLLAHI, HASAN. (2015). THE EFFECT OF USING A THIN SILICON ISLAND UNDERNEATH THE MEMBRANE ON MEMS MICRO-HEATER PERFORMANCE. ADVANCED PROCESSES IN MATERIALS, 9(3 (34)), 93-106. SID. https://sid.ir/paper/172613/en

Vancouver: Copy

SAMAEIFAR FATEMEH, AFIFI AHMAD, ABDOLLAHI HASAN. THE EFFECT OF USING A THIN SILICON ISLAND UNDERNEATH THE MEMBRANE ON MEMS MICRO-HEATER PERFORMANCE. ADVANCED PROCESSES IN MATERIALS[Internet]. 2015;9(3 (34)):93-106. Available from: https://sid.ir/paper/172613/en

IEEE: Copy

FATEMEH SAMAEIFAR, AHMAD AFIFI, and HASAN ABDOLLAHI, “THE EFFECT OF USING A THIN SILICON ISLAND UNDERNEATH THE MEMBRANE ON MEMS MICRO-HEATER PERFORMANCE,” ADVANCED PROCESSES IN MATERIALS, vol. 9, no. 3 (34), pp. 93–106, 2015, [Online]. Available: https://sid.ir/paper/172613/en

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