FABRICATION OF BIOLOGICAL MATERIAL DETECTOR WITH FBAR-BASED SENSOR USING MEMS TECHNOLOGY

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SHARIFI MALIHE; SAMAEIFAR FATEMEH; ALLAHVERDI ZEINAB; ERFANIAN ALIREZA

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Journal: ELECTRONIC INDUSTRIES Year:2016 | Volume:6 | Issue:4 Page(s): 21-29

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Title

FABRICATION OF BIOLOGICAL MATERIAL DETECTOR WITH FBAR-BASED SENSOR USING MEMS TECHNOLOGY

Author(s)

SHARIFI MALIHE | SAMAEIFAR FATEMEH | ALLAHVERDI ZEINAB | ERFANIAN ALIREZA | Issue Writer Certificate

Keywords

FILM BULK ACOUSTIC RESONATORQ2

MICROELECTROMECHANICAL SYSTEMSQ2

PIEZOELECTRICQ2

BULK MICROMACHININGQ2

Abstract

In this paper, Fabrication of Biological material detector, which detects using FILM BULK ACOUSTIC RESONATOR (FBAR) technique, based on MEMS technology is introduced. Fabricated sensor consists of a thin oxide silicone membrane on which a PIEZOELECTRIC layer is sandwiched between two gold electrodes. To detect specific Biological material, antibodies which are sensitive to goal Biological material were immobilized on the backside of FBAR sensor. Biological material detection is done through the mass sensing. When the specific Biological material is exposed to the sensor, it binds to the antibody on the sensor, causing a shift in the resonant frequency of the FBAR sensor. Some integrated circuit processes such as E-beam evaporation of Au, RF magnetron Sputtering of ZnO, wet etching process, and photolithography process are used to fabricate this detector. For fabrication of thin membrane, BULK MICROMACHINING method is used. In addition, to test the fabricated sensor, a new set up is designed and fabricated. With coating of anti-TNT layer on the backside of the fabricated sensor, it gets sensitive to TNT.

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APA: Copy

SHARIFI, MALIHE, SAMAEIFAR, FATEMEH, ALLAHVERDI, ZEINAB, & ERFANIAN, ALIREZA. (2016). FABRICATION OF BIOLOGICAL MATERIAL DETECTOR WITH FBAR-BASED SENSOR USING MEMS TECHNOLOGY. ELECTRONIC INDUSTRIES, 6(4), 21-29. SID. https://sid.ir/paper/229574/en

Vancouver: Copy

SHARIFI MALIHE, SAMAEIFAR FATEMEH, ALLAHVERDI ZEINAB, ERFANIAN ALIREZA. FABRICATION OF BIOLOGICAL MATERIAL DETECTOR WITH FBAR-BASED SENSOR USING MEMS TECHNOLOGY. ELECTRONIC INDUSTRIES[Internet]. 2016;6(4):21-29. Available from: https://sid.ir/paper/229574/en

IEEE: Copy

MALIHE SHARIFI, FATEMEH SAMAEIFAR, ZEINAB ALLAHVERDI, and ALIREZA ERFANIAN, “FABRICATION OF BIOLOGICAL MATERIAL DETECTOR WITH FBAR-BASED SENSOR USING MEMS TECHNOLOGY,” ELECTRONIC INDUSTRIES, vol. 6, no. 4, pp. 21–29, 2016, [Online]. Available: https://sid.ir/paper/229574/en

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