FABRICATION OF ELECTROSTATIC MICRO ACTUATOR WITH SU-8 POLYMER FOR CONTINUOUS DIAPHRAGM-BASED DEVICES

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ESFANDIYARI MEHRNAZ; ASADI REZA; HEYDARI PAYAM; SHAMSI ALIREZA

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Journal: ELECTRONIC INDUSTRIES Year:2015 | Volume:6 | Issue:3 Page(s): 81-87

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Information Journal Paper

Title

FABRICATION OF ELECTROSTATIC MICRO ACTUATOR WITH SU-8 POLYMER FOR CONTINUOUS DIAPHRAGM-BASED DEVICES

Author(s)

ESFANDIYARI MEHRNAZ | ASADI REZA | HEYDARI PAYAM | SHAMSI ALIREZA | Issue Writer Certificate

Keywords

MICRO ELECTROMECHANICAL SYSTEMQ2

ELECTROSTATICQ2

ACTUATORSQ2

MICRO ACTUATORSQ2

SU-8Q2

Abstract

In this paper, a novel method for fabrication of polymeric ELECTROSTATIC micro actuator with a continuous diaphragm is presented which can be used in diaphragm motion- based devices. In order to high accuracy and simple fabrication process, there is tendency to use ELECTROSTATIC micro ACTUATORS. But, high stimulation voltage has restricted them to be used in MEMS devices. This problem is solved by usage of SU -8 as diaphragm due to its lower Yang's module. It is also used as spacer between two electrodes. Furthermore, Polymer-based micro fabrication leads to simplicity and lower cost involved. Finite Element Method is used to optimize design of micro actuator. The thickness of diaphragm is 10mm and the free space between two electrodes is 25mm. The experimental results of actuation was up to 4mm for 200 vlots.

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APA: Copy

ESFANDIYARI, MEHRNAZ, ASADI, REZA, HEYDARI, PAYAM, & SHAMSI, ALIREZA. (2015). FABRICATION OF ELECTROSTATIC MICRO ACTUATOR WITH SU-8 POLYMER FOR CONTINUOUS DIAPHRAGM-BASED DEVICES. ELECTRONIC INDUSTRIES, 6(3), 81-87. SID. https://sid.ir/paper/229666/en

Vancouver: Copy

ESFANDIYARI MEHRNAZ, ASADI REZA, HEYDARI PAYAM, SHAMSI ALIREZA. FABRICATION OF ELECTROSTATIC MICRO ACTUATOR WITH SU-8 POLYMER FOR CONTINUOUS DIAPHRAGM-BASED DEVICES. ELECTRONIC INDUSTRIES[Internet]. 2015;6(3):81-87. Available from: https://sid.ir/paper/229666/en

IEEE: Copy

MEHRNAZ ESFANDIYARI, REZA ASADI, PAYAM HEYDARI, and ALIREZA SHAMSI, “FABRICATION OF ELECTROSTATIC MICRO ACTUATOR WITH SU-8 POLYMER FOR CONTINUOUS DIAPHRAGM-BASED DEVICES,” ELECTRONIC INDUSTRIES, vol. 6, no. 3, pp. 81–87, 2015, [Online]. Available: https://sid.ir/paper/229666/en

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