MEASURING SMALL DISPLACEMENTS BY USING A CAPACITIVE TRANSDUCER SYSTEM

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GOLNABI H.

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

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Journal: Scientia Iranica Year:2000 | Volume:7 | Issue:1 (SCIENCE) Page(s): 69-74

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Title

MEASURING SMALL DISPLACEMENTS BY USING A CAPACITIVE TRANSDUCER SYSTEM

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GOLNABI H. | Issue Writer Certificate

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Abstract

In this paper, application of a capacitive sensor system in recording small displacements is discussed. Through using a simple transducer and a monitoring circuit, change in capacitance has been detected as a function of the capacitor air-gap distance. There is a linear relation between gap distance and output of a sensor for a wide gap range of 0.5 to 5 mm. The reported system provides means for measuring displacements up to 5 mm with a resolution better than 250 nm. By decreasing the dynamic range of the transducer to 250 mm, a small displacement of the order of 100nm is detectable. With the present system, a minimum displacement of about 200 nm (200 ppm) for the gap distance of 1 mm is obtained. However, through changing the sensor design, the measuring circuit becomes capable of recording smaller distances of the order of 10 nm at this operating range.

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APA: Copy

GOLNABI, H.. (2000). MEASURING SMALL DISPLACEMENTS BY USING A CAPACITIVE TRANSDUCER SYSTEM. SCIENTIA IRANICA, 7(1 (SCIENCE)), 69-74. SID. https://sid.ir/paper/289718/en

Vancouver: Copy

GOLNABI H.. MEASURING SMALL DISPLACEMENTS BY USING A CAPACITIVE TRANSDUCER SYSTEM. SCIENTIA IRANICA[Internet]. 2000;7(1 (SCIENCE)):69-74. Available from: https://sid.ir/paper/289718/en

IEEE: Copy

H. GOLNABI, “MEASURING SMALL DISPLACEMENTS BY USING A CAPACITIVE TRANSDUCER SYSTEM,” SCIENTIA IRANICA, vol. 7, no. 1 (SCIENCE), pp. 69–74, 2000, [Online]. Available: https://sid.ir/paper/289718/en

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