NANO-STRUCTURE AND ELECTRICAL PROPERTIES OF TITANIUM THIN FILMS AS A FUNCTION OF SUBSTRATE TEMPERATURE

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KHOJIER K.; SAVALONI H.; GHORANNEVISS M.

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Journal Paper

Paper Information

Journal: JOURNAL OF THEORETICAL AND APPLIED PHYSICS (IRANIAN PHYSICAL JOURNAL) Year:2008 | Volume:2 | Issue:2 Page(s): 37-41

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Title

NANO-STRUCTURE AND ELECTRICAL PROPERTIES OF TITANIUM THIN FILMS AS A FUNCTION OF SUBSTRATE TEMPERATURE

Author(s)

KHOJIER K. | SAVALONI H. | GHORANNEVISS M. | Issue Writer Certificate

Keywords

TI THIN FILMS

CONDUCTIVITY

GRAIN SIZE

ROUGHNESS

Abstract

The nano-structural and electrical properties of titanium thin film of 237 nm thickness deposited with a rate of 3.0 nms-1 on glass substrates at different substrate temperatures (390, 470, 510 and 580 K) are studied. The nanostructure of these films was obtained using x-ray diffraction (XRD) and atomic force microscopy (AFM), while the thickness were measured by means of Rutherford back scattering (RBS). XRD results show the development of A (112) TiO2 preferred orientation by increasing the substrate temperature. The results also show that the GRAIN SIZE, the ROUGHNESS and the CONDUCTIVITY of these films increase with substrate temperature.

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APA: Copy

KHOJIER, K., SAVALONI, H., & GHORANNEVISS, M.. (2008). NANO-STRUCTURE AND ELECTRICAL PROPERTIES OF TITANIUM THIN FILMS AS A FUNCTION OF SUBSTRATE TEMPERATURE. JOURNAL OF THEORETICAL AND APPLIED PHYSICS (IRANIAN PHYSICAL JOURNAL), 2(2), 37-41. SID. https://sid.ir/paper/318631/en

Vancouver: Copy

KHOJIER K., SAVALONI H., GHORANNEVISS M.. NANO-STRUCTURE AND ELECTRICAL PROPERTIES OF TITANIUM THIN FILMS AS A FUNCTION OF SUBSTRATE TEMPERATURE. JOURNAL OF THEORETICAL AND APPLIED PHYSICS (IRANIAN PHYSICAL JOURNAL)[Internet]. 2008;2(2):37-41. Available from: https://sid.ir/paper/318631/en

IEEE: Copy

K. KHOJIER, H. SAVALONI, and M. GHORANNEVISS, “NANO-STRUCTURE AND ELECTRICAL PROPERTIES OF TITANIUM THIN FILMS AS A FUNCTION OF SUBSTRATE TEMPERATURE,” JOURNAL OF THEORETICAL AND APPLIED PHYSICS (IRANIAN PHYSICAL JOURNAL), vol. 2, no. 2, pp. 37–41, 2008, [Online]. Available: https://sid.ir/paper/318631/en

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