ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE)

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SHAHIRI TABARESTANI M.; AZIZOLLAH GANJI B.

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Journal Paper

Paper Information

Journal: INTERNATIONAL JOURNAL OF ENGINEERING Year:2013 | Volume:26 | Issue:3 (TRANSACTIONS C: ASPECTS) Page(s): 297-302

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Information Journal Paper

Title

ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE)

Author(s)

SHAHIRI TABARESTANI M. | AZIZOLLAH GANJI B. | Issue Writer Certificate

Keywords

CAPACITANCE

DEFLECTION

CAPACITIVE PRESSURE SENSOR

DIAPHRAGM DEFLECTION

Abstract

In this paper, analytical analysis of CAPACITIVE PRESSURE SENSOR with clamped diaphragm is presented. Mechanical and electrical properties of the sensor are theoretically analyzed based on theory of thin plates with small DEFLECTION and the results are evaluated using finite element analysis. The central DEFLECTION and CAPACITANCE values under uniform external pressure are calculated. Comparison of theoretical results shows good agreement with finite element analysis. The results indicate that the mathematical model has a high accuracy to determine the sensor behaviors.

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APA: Copy

SHAHIRI TABARESTANI, M., & AZIZOLLAH GANJI, B.. (2013). ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE). INTERNATIONAL JOURNAL OF ENGINEERING, 26(3 (TRANSACTIONS C: ASPECTS)), 297-302. SID. https://sid.ir/paper/586835/en

Vancouver: Copy

SHAHIRI TABARESTANI M., AZIZOLLAH GANJI B.. ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE). INTERNATIONAL JOURNAL OF ENGINEERING[Internet]. 2013;26(3 (TRANSACTIONS C: ASPECTS)):297-302. Available from: https://sid.ir/paper/586835/en

IEEE: Copy

M. SHAHIRI TABARESTANI, and B. AZIZOLLAH GANJI, “ANALYTICAL ANALYSIS OF CAPACITIVE PRESSURE SENSOR WITH CLAMPED DIAPHRAGM (RESEARCH NOTE),” INTERNATIONAL JOURNAL OF ENGINEERING, vol. 26, no. 3 (TRANSACTIONS C: ASPECTS), pp. 297–302, 2013, [Online]. Available: https://sid.ir/paper/586835/en

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