Information Journal Paper
APA:
CopyDAVIS, Z.J., ABADAL, G., & HANSEN, O.. (2003). AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS. ULTRAMICROSCOPY, 97(1-4), 467-472. SID. https://sid.ir/paper/597661/en
Vancouver:
CopyDAVIS Z.J., ABADAL G., HANSEN O.. AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS. ULTRAMICROSCOPY[Internet]. 2003;97(1-4):467-472. Available from: https://sid.ir/paper/597661/en
IEEE:
CopyZ.J. DAVIS, G. ABADAL, and O. HANSEN, “AFM LITHOGRAPHY OF ALUMINUM FOR FABRICATION OF NANOMECHANICAL SYSTEMS,” ULTRAMICROSCOPY, vol. 97, no. 1-4, pp. 467–472, 2003, [Online]. Available: https://sid.ir/paper/597661/en