Information Journal Paper
APA:
CopyLU, Z.Y., LEE, S.H., & GORANTLA, V.R.K.. (2003). EFFECTS OF MIXED ABRASIVES IN CHEMICAL MECHANICAL POLISHING OF OXIDE FILMS. JOURNAL OF MATERIALS RESEARCH, 18(-), 2323-2330. SID. https://sid.ir/paper/635633/en
Vancouver:
CopyLU Z.Y., LEE S.H., GORANTLA V.R.K.. EFFECTS OF MIXED ABRASIVES IN CHEMICAL MECHANICAL POLISHING OF OXIDE FILMS. JOURNAL OF MATERIALS RESEARCH[Internet]. 2003;18(-):2323-2330. Available from: https://sid.ir/paper/635633/en
IEEE:
CopyZ.Y. LU, S.H. LEE, and V.R.K. GORANTLA, “EFFECTS OF MIXED ABRASIVES IN CHEMICAL MECHANICAL POLISHING OF OXIDE FILMS,” JOURNAL OF MATERIALS RESEARCH, vol. 18, no. -, pp. 2323–2330, 2003, [Online]. Available: https://sid.ir/paper/635633/en