DESIGN AND FABRICATION OF A SEMI INDUSTRIAL CYLINDRICAL MAGNETRON DISCHARGE

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PAYAM ARA J.; YASERIAN K.; GHORANNEVIS M.

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Journal: JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY) Year:2007 | Volume:17 | Issue:63 (PHYSICS ISSUE) Page(s): 13-19

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Information Journal Paper

Title

DESIGN AND FABRICATION OF A SEMI INDUSTRIAL CYLINDRICAL MAGNETRON DISCHARGE

Author(s)

PAYAM ARA J. | YASERIAN K. | GHORANNEVIS M. | Issue Writer Certificate

Keywords

DISCHARGEQ3

MAGNETRONQ3

SPUTTERINGQ3

THICKNESS OF THIN FILMQ3

XRDQ3

AFMQ3

Abstract

A semi industrial cylindrical MAGNETRON DISCHARGE is designed and fabricated and experimental results which we are going to discuss in this paper are reported. This system which usually called CMD contains of two coaxial metallic cylinders with different diameters, serving as the cathode and the anode. In post MAGNETRON mode the inner one is cathode and the other is anode. Two magnetic coils are placed around the outside of the anode and inside the cathode. The working gas in this investigation is Argon. By this system, copper thin films are sputtered at different pressures and then are analyzed by different methods and finally the dependence of THICKNESS OF THIN FILMs on pressure is obtained.

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APA: Copy

PAYAM ARA, J., YASERIAN, K., & GHORANNEVIS, M.. (2007). DESIGN AND FABRICATION OF A SEMI INDUSTRIAL CYLINDRICAL MAGNETRON DISCHARGE. JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY), 17(63 (PHYSICS ISSUE)), 13-19. SID. https://sid.ir/paper/70440/en

Vancouver: Copy

PAYAM ARA J., YASERIAN K., GHORANNEVIS M.. DESIGN AND FABRICATION OF A SEMI INDUSTRIAL CYLINDRICAL MAGNETRON DISCHARGE. JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY)[Internet]. 2007;17(63 (PHYSICS ISSUE)):13-19. Available from: https://sid.ir/paper/70440/en

IEEE: Copy

J. PAYAM ARA, K. YASERIAN, and M. GHORANNEVIS, “DESIGN AND FABRICATION OF A SEMI INDUSTRIAL CYLINDRICAL MAGNETRON DISCHARGE,” JOURNAL OF SCIENCES (ISLAMIC AZAD UNIVERSITY), vol. 17, no. 63 (PHYSICS ISSUE), pp. 13–19, 2007, [Online]. Available: https://sid.ir/paper/70440/en

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