SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS

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ASHRAFI MOHAMMAD REZA; KASHEFIAN ALI; RASHIDIAN BIZHAN

مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

Seminar Paper

Paper Information

Seminar: NATIONAL VACUUM CONFERENCE IRAN
Year:2008 | Issue:3

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Title

SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS

Author(s)

ASHRAFI MOHAMMAD REZA | KASHEFIAN ALI | RASHIDIAN BIZHAN

Keywords

Not Registered.

Abstract

IN THIS PAPER WE REPORT A MEASUREMENT TECHNIQUE FOR SIMULTANEOUSLY DETERMINING COMPLEX DIELECTRIC CONSTANT AND THICKNESS OF ULTRA-THIN FILMS. FOR THIS PURPOSE WE ANALYZE A SET OF REFLECTED AND TRANSMITTED LIGHT INTENSITY EQUATIONS AND OBTAIN REAL AND IMAGINARY PARTS OF THE DIELECTRIC CONSTANT AND THICKNESS OF THE GROWING FILM. EXPERIMENTAL RESULTS OBTAINED BY A DESIGNED REAL-TIME SYSTEM IS REPORTED FOR ALUMINUM COATING ON GLASS SUBSTRATE AT TWO LASER LIGHT WAVELENGTHS OF 650NM (LIGHT RED) AND 780NM (NEAR INFRARED).

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APA: Copy

ASHRAFI, MOHAMMAD REZA, KASHEFIAN, ALI, & RASHIDIAN, BIZHAN. (2008). SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS. NATIONAL VACUUM CONFERENCE IRAN. SID. https://sid.ir/paper/905420/en

Vancouver: Copy

ASHRAFI MOHAMMAD REZA, KASHEFIAN ALI, RASHIDIAN BIZHAN. SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS. 2008. Available from: https://sid.ir/paper/905420/en

IEEE: Copy

MOHAMMAD REZA ASHRAFI, ALI KASHEFIAN, and BIZHAN RASHIDIAN, “SIMULTANEOUS IN SITU THICKNESS MONITORING OF THIN FILMS AND DETERMINING THEIR DIELECTRIC PROPERTIES BASED ON MULTIPLE INCIDENT LASERS BEAMS,” presented at the NATIONAL VACUUM CONFERENCE IRAN. 2008, [Online]. Available: https://sid.ir/paper/905420/en

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