EXPERIMENTAL INVESTIGATION OF CU AND AL DEPOSITION USING SPUTTERING METHOD

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NOFEREST A.A.; ENTEZAMI PAZHOH M.; SAYEDI S.S.

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Seminar Paper

Paper Information

Seminar: NATIONAL VACUUM CONFERENCE IRAN
Year:2012 | Issue:5

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Title

EXPERIMENTAL INVESTIGATION OF CU AND AL DEPOSITION USING SPUTTERING METHOD

Author(s)

NOFEREST A.A. | ENTEZAMI PAZHOH M. | SAYEDI S.S.

Keywords

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Abstract

THE UNDERSTANDING OF THE PARAMETERS WHICH AFFECTS THE FILM THICKNESS DISTRIBUTION AND THE TARGET BEHAVIOR DURING DEPOSITION AND THE WAY IT AFFECTS FILM PROPERTIES WILL UNEQUIVOCALLY IMPROVE COATINGS PROPERTIES. THIS PAPER EXAMINES THE DEPOSITION OF CU COATING IN BOTH HIGH AND VERY LOW RANGE OF PRESSURE, EXPERIMENTALLY. THE THICKNESS DISTRIBUTION OF THE ALUMINUM COATING HAS BEEN STUDIED USING DC MAGNETRON SPUTTERING METHOD, TOO. THE EXPERIMENTAL RESULTS COMPARE WELL WITH THOSE OBTAINED BY THEORETICAL METHODS GIVEN THE DC MAGNETRON SPUTTERING MODELS USED FOR THE STUDY. IN BOTH PRESSURE RANGES, FILM UNIFORMITY DEPENDS ON THE LOCATION OF THE SUBSTRATE. THE EFFECT OF PRESSURE, TARGET MATERIAL AND CURRENT ON THE SCATTERING IS ILLUSTRATED DIAGRAMMATICALLY AND THE VALIDITY OF PRESENTED MODEL IN BOTH PRESSURE RANGES ARE PROVED.

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APA: Copy

NOFEREST, A.A., ENTEZAMI PAZHOH, M., & SAYEDI, S.S.. (2012). EXPERIMENTAL INVESTIGATION OF CU AND AL DEPOSITION USING SPUTTERING METHOD. NATIONAL VACUUM CONFERENCE IRAN. SID. https://sid.ir/paper/906947/en

Vancouver: Copy

NOFEREST A.A., ENTEZAMI PAZHOH M., SAYEDI S.S.. EXPERIMENTAL INVESTIGATION OF CU AND AL DEPOSITION USING SPUTTERING METHOD. 2012. Available from: https://sid.ir/paper/906947/en

IEEE: Copy

A.A. NOFEREST, M. ENTEZAMI PAZHOH, and S.S. SAYEDI, “EXPERIMENTAL INVESTIGATION OF CU AND AL DEPOSITION USING SPUTTERING METHOD,” presented at the NATIONAL VACUUM CONFERENCE IRAN. 2012, [Online]. Available: https://sid.ir/paper/906947/en

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