Objective: The importance of the correct selection of advanced technology projects, the importance of sustainable development in the strategic plans of the implementing organizations of such projects, the impressive impact of this technology in all aspects, and the improvement of the quality of human life and the high uncertainty in the environment of such projects, the reason is for addressing this research. Methods: By reviewing the literature and research background, prioritizing high technology projects based on human capital criteria, innovation, project business achievement, economic returns, national influence levels and competitive advantage, quality, demand level, reliability and strategic plans, and project costs Was considered. After reviewing the models and prioritization methods and choosing the type of projects, the preferred structure of output-to-scale output efficiency model was selected in the data envelopment analysis approach as the most comprehensive model in this field. By using the fuzzy hierarchy process analysis, the most important criteria were weighted and ranked. Results: As a result of the implementation of the preferred cost-benefit model of output to output-oriented output scale, among the 30 projects of the Nanotechnology Development Specialized Headquarters, 46. 67% of the projects have been identified as the most priority projects and suitable for investment. Conclusion: Projects 19, 28, and 7 were the first to third priorities respectively. The projects in the final priorities can according to the template of the specified reference set, become the first priorities for implementation.