DESIGN AND SIMULATION OF PRESSURESENSOR AND ACCELEROMETER BASED ON INTEGRATED OPTICAL CIRCUITS USING PHOTOELASTIC EFFECT OF LINBO3

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JOUDI N.; ASADI R.; HEYDARI P.; GANJI M.

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Journal: Iranian Journal of Physics Research Year:2016 | Volume:16 | Issue:1 Page(s): 45-53

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Information Journal Paper

Title

DESIGN AND SIMULATION OF PRESSURESENSOR AND ACCELEROMETER BASED ON INTEGRATED OPTICAL CIRCUITS USING PHOTOELASTIC EFFECT OF LINBO3

Author(s)

JOUDI N. | ASADI R. | HEYDARI P. | GANJI M. | Issue Writer Certificate

Keywords

MICROQ1

OPTOQ1

ELECTROQ1

MECHANICAL SYSTEMS (MOEMS)Q1

OPTICSQ1

PHOTOQ1

ELASTICQ1

PRESSURE SENSORQ1

Abstract

In this paper a novel optical pressure and acceleration sensor based on MICRO ELECTRO mechanical systems (MEOMS) has been designed. For this purpose an integrated Mach- Zander interferometer has been used in LiNbO3 diaphragm. In this sensor, the strain caused by applied pressure or acceleration leads to a change in refractive index of the wave guide in the diaphragm due to the PHOTOelastic effect. The refractive index change leads to a phase change in the light wave that propagates in the waveguide. This phase change is converted to intensity change using the Mach- Zander interferometer. The software ANSYS 14.5 was used for calculation of the strain in the diaphragm. The pressure and acceleration sensitivity of the designed sensor have been obtained 2.33×10-4 (rad /Pa) and 2.16×10-5 (rad.s2/m), respectively.

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APA: Copy

JOUDI, N., ASADI, R., HEYDARI, P., & GANJI, M.. (2016). DESIGN AND SIMULATION OF PRESSURESENSOR AND ACCELEROMETER BASED ON INTEGRATED OPTICAL CIRCUITS USING PHOTOELASTIC EFFECT OF LINBO3. IRANIAN JOURNAL OF PHYSICS RESEARCH, 16(1), 45-53. SID. https://sid.ir/paper/1445/en

Vancouver: Copy

JOUDI N., ASADI R., HEYDARI P., GANJI M.. DESIGN AND SIMULATION OF PRESSURESENSOR AND ACCELEROMETER BASED ON INTEGRATED OPTICAL CIRCUITS USING PHOTOELASTIC EFFECT OF LINBO3. IRANIAN JOURNAL OF PHYSICS RESEARCH[Internet]. 2016;16(1):45-53. Available from: https://sid.ir/paper/1445/en

IEEE: Copy

N. JOUDI, R. ASADI, P. HEYDARI, and M. GANJI, “DESIGN AND SIMULATION OF PRESSURESENSOR AND ACCELEROMETER BASED ON INTEGRATED OPTICAL CIRCUITS USING PHOTOELASTIC EFFECT OF LINBO3,” IRANIAN JOURNAL OF PHYSICS RESEARCH, vol. 16, no. 1, pp. 45–53, 2016, [Online]. Available: https://sid.ir/paper/1445/en

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