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Information Journal Paper

Title

Annealing Effects on Physical and Sensing Characterization of Nanostructured MnO Thin Films

Pages

  1291-1302

Abstract

 MnO thin films with different annealing temperatures were deposited via chemical spray pyrolysis. XRD analysis indicates that all films were polycrystalline with a dominant peak along the (111) plane. The average crystallite was increased via annealing temperature (400 to 500) oC. The dislocation density decreased from 50.33 to 42.18 nm when annealing temperature was raised from (400 to 500) oC. AFM was used to evaluate the morphology of the deposit films. As annealing temperature increased, the average particle size was measured to be between 77.6, 46.1, and 32.6 nm. SEM images show uniform spherical nano-grains, altering film morphology, which decreases with increasing temperature. The UV-Visible absorption spectra were utilized to obtain the optical parameters. Variations in film sensitivity to NO2 at different annealing temperatures highlight intricate relationships between temperature, film responsiveness, and NO2 concentration response. Oxidation induced by NO2 in MnO film (400, 450, and 500) °C results in elevated resistance due to electron drift, correlating with sensitivity, with the highest resistance observed at 500 °C.

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