مرکز اطلاعات علمی Scientific Information Database (SID) - Trusted Source for Research and Academic Resources

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Cites:

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Information Journal Paper

Title

NANOMETER-SCALE PATTERNING ON PMMA RESIST BY FORCE MICROSCOPY LITHOGRAPHY

Pages

  29-34

Abstract

 Nanoscale science and technology has today mainly focused on the fabrication of nano devices. In this paper, we study the use of lithography process to build the desired nanostructures directly. Nanolithography on polymethylmethacrylate (PMMA) surface is carried out by using Atomic Force Microscope (AFM) equipped with silicon tip, in contact mode. The analysis of the results shows that the depth of scratches increases with the increase of applied normal force. The scanning velocity is also shown to influence the AFM patterning process. As the scanning velocity increases, the scratch depth decreases. The influence of time and number of scratching cycles is also investigated.

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    • Cite

    APA: Copy

    SADEGH HASANI, S., SOBAT, Z., & AGHABOZORG, H.R.. (2008). NANOMETER-SCALE PATTERNING ON PMMA RESIST BY FORCE MICROSCOPY LITHOGRAPHY. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), 27(4), 29-34. SID. https://sid.ir/paper/551648/en

    Vancouver: Copy

    SADEGH HASANI S., SOBAT Z., AGHABOZORG H.R.. NANOMETER-SCALE PATTERNING ON PMMA RESIST BY FORCE MICROSCOPY LITHOGRAPHY. IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE)[Internet]. 2008;27(4):29-34. Available from: https://sid.ir/paper/551648/en

    IEEE: Copy

    S. SADEGH HASANI, Z. SOBAT, and H.R. AGHABOZORG, “NANOMETER-SCALE PATTERNING ON PMMA RESIST BY FORCE MICROSCOPY LITHOGRAPHY,” IRANIAN JOURNAL OF CHEMISTRY AND CHEMICAL ENGINEERING (IJCCE), vol. 27, no. 4, pp. 29–34, 2008, [Online]. Available: https://sid.ir/paper/551648/en

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