DESIGN AND FABRICATION OF A GAS FLOW SENSOR AND GLASS MEMBRANE USING THIN FILM AND MICROMACHINING TECHNIQUES

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MOZAFARI M.; ARZI E.A.; MOHAJERZADEH S.SH.A.D.

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Paper Information

Journal: SHAHID CHAMRAN UNIVERSITY JOURNAL OF SCIENCE Year:2007 | Volume:NEW SERIES | Issue:16 (SECTION A) Page(s): 56-65

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Title

DESIGN AND FABRICATION OF A GAS FLOW SENSOR AND GLASS MEMBRANE USING THIN FILM AND MICROMACHINING TECHNIQUES

Author(s)

MOZAFARI M. | ARZI E.A. | MOHAJERZADEH S.SH.A.D. | Issue Writer Certificate

Keywords

SENSORQ3

TERMOCOUPLEQ3

MICROMACHININGQ3

GAS FLOWQ3

THIN FILMQ3

Abstract

Gas flow meter SENSOR is produced with THIN FILM techniques. This SENSOR is of thermal type, and when GAS FLOWs over the heater, some thermal energy is. carried away, hence temperature difference is produced between two sides of the heater. Temperature sensitive element of this SENSOR is made of two Ni-Cr thermo arrays. This SENSOR can measure the flow within 10 Sccm to 10000 Sccm in the rectangular duct of cross section 1x15 mm2. Design, mask making, different deposition, lithography and etching of these layers are successfully done. MICROMACHINING over glass for producing glass membrane is carried out. The results of the experiments on the behavior and response of this SENSOR is reported which showing the SENSOR response to be linear up to 1000 Sccm. A new geometrical design is proposed which will increase the sensitivity of the SENSOR.

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APA: Copy

MOZAFARI, M., ARZI, E.A., & MOHAJERZADEH, S.SH.A.D.. (2007). DESIGN AND FABRICATION OF A GAS FLOW SENSOR AND GLASS MEMBRANE USING THIN FILM AND MICROMACHINING TECHNIQUES. SHAHID CHAMRAN UNIVERSITY JOURNAL OF SCIENCE, NEW SERIES(16 (SECTION A)), 56-65. SID. https://sid.ir/paper/58003/en

Vancouver: Copy

MOZAFARI M., ARZI E.A., MOHAJERZADEH S.SH.A.D.. DESIGN AND FABRICATION OF A GAS FLOW SENSOR AND GLASS MEMBRANE USING THIN FILM AND MICROMACHINING TECHNIQUES. SHAHID CHAMRAN UNIVERSITY JOURNAL OF SCIENCE[Internet]. 2007;NEW SERIES(16 (SECTION A)):56-65. Available from: https://sid.ir/paper/58003/en

IEEE: Copy

M. MOZAFARI, E.A. ARZI, and S.SH.A.D. MOHAJERZADEH, “DESIGN AND FABRICATION OF A GAS FLOW SENSOR AND GLASS MEMBRANE USING THIN FILM AND MICROMACHINING TECHNIQUES,” SHAHID CHAMRAN UNIVERSITY JOURNAL OF SCIENCE, vol. NEW SERIES, no. 16 (SECTION A), pp. 56–65, 2007, [Online]. Available: https://sid.ir/paper/58003/en

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