M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES

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OSTERBERG P.M.; SENTURIA S.D.

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Journal Paper

Paper Information

Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Year:1997 | Volume:6 | Issue:2 Page(s): 107-118

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Information Journal Paper

Title

M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES

Author(s)

OSTERBERG P.M. | SENTURIA S.D. | Issue Writer Certificate

Keywords

Not Registered.

Abstract

Cites

DYNAMIC CHARACTERISTICS AND VIBRATIONAL RESPONSE OF A CAPACITIVE MICRO-PHASE SHIFTER
MECHANICAL BEHAVIOR OF AN ELECTROSTATICALLY-ACTUATED MICROBEAM UNDER MECHANICAL SHOCK
STUDY ON THE PULL-IN INSTABILITY OF GOLD MICRO-SWITCHES USING VARIABLE LENGTH SCALE PARAMETER

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APA: Copy

OSTERBERG, P.M., & SENTURIA, S.D.. (1997). M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 6(2), 107-118. SID. https://sid.ir/paper/605604/en

Vancouver: Copy

OSTERBERG P.M., SENTURIA S.D.. M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[Internet]. 1997;6(2):107-118. Available from: https://sid.ir/paper/605604/en

IEEE: Copy

P.M. OSTERBERG, and S.D. SENTURIA, “M-TEST: A TEST CHIP FOR MEMS MATERIAL PROPERTY MEASUREMENT USING ELECTROSTATICALLY ACTUATED TEST STRUCTURES,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 6, no. 2, pp. 107–118, 1997, [Online]. Available: https://sid.ir/paper/605604/en

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