BIMATERIAL PROOF MASS CAPACITIVE MICRO ACCELEROMETER FOR INCREASING SENSITIVITY

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Sabet Imani Maryam

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Seminar Paper

Paper Information

Seminar: CONFERENCE OF IRANIAN AEROSPACE SOCIETY
Year:2015 | Issue:14

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Title

BIMATERIAL PROOF MASS CAPACITIVE MICRO ACCELEROMETER FOR INCREASING SENSITIVITY

Author(s)

Sabet Imani Maryam

Keywords

MEMS ACCELEROMETER

CAPACITIVE

LARGE PROOF MASS

SENSITIVITY

SPRING

OPTIMIZATION

Abstract

THIS PAPER PRESENTS A NEW APPROACH TO IMPROVE THE PERFORMANCE OF MEMS CAPACITIVE ACCELEROMETER USING A METAL BLOCK IN THE PROOF MASS STRUCTURE. IN ADDITION, FOR THE DESIGN OF THE CAPACITIVE ACCELEROMETER IS FOCUSED ON THE SPRING GEOMETRY AND IS SHOWN THAT THE LENGTH OF LONG BEAM AND THICKNESS OF THE SERPENTINE SPRING ARE CRITICAL PARAMETERS WHICH SHOULD BE OPTIMIZED TO DECREASE THE SPRING CONSTANT IN THE SENSE DIRECTION AND INCREASE IT IN OTHER DIRECTIONS. THE FINITE ELEMENT METHOD SIMULATOR, ANSYS, IS USED TO FIND OPTIMUM DIMENSIONS AND TO PREDICT SPECIFICATIONS OF THE ACCELEROMETER. SENSITIVITY IS INCREASED FROM 42.853 TO 17.7 PF/G AND THE NOISE FLOOR IS DECREASED FROM 52.1 TO 21.9&NBSP;MM/Ö`HZ BY ADDING THE CUPPER BLOCK IN THE PROOF MASS. THE RESONANCE FREQUENCY IS DROPPED FROM 36955 TO 23769 HZ, TOO.

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APA: Copy

Sabet Imani, Maryam. (2015). BIMATERIAL PROOF MASS CAPACITIVE MICRO ACCELEROMETER FOR INCREASING SENSITIVITY. CONFERENCE OF IRANIAN AEROSPACE SOCIETY. SID. https://sid.ir/paper/945699/en

Vancouver: Copy

Sabet Imani Maryam. BIMATERIAL PROOF MASS CAPACITIVE MICRO ACCELEROMETER FOR INCREASING SENSITIVITY. 2015. Available from: https://sid.ir/paper/945699/en

IEEE: Copy

Maryam Sabet Imani, “BIMATERIAL PROOF MASS CAPACITIVE MICRO ACCELEROMETER FOR INCREASING SENSITIVITY,” presented at the CONFERENCE OF IRANIAN AEROSPACE SOCIETY. 2015, [Online]. Available: https://sid.ir/paper/945699/en

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