QUALITY FACTORS IN MICRON- AND SUBMICRON-THICK CANTILEVERS

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YASUMURA K.Y.; STOWE T.D.; CHOW E.M.

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Journal Paper

Paper Information

Journal: JOURNAL OF MICROELECTROMECHANICAL SYSTEMS Year:2000 | Volume:9 | Issue:1 Page(s): 117-125

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Information Journal Paper

Title

QUALITY FACTORS IN MICRON- AND SUBMICRON-THICK CANTILEVERS

Author(s)

YASUMURA K.Y. | STOWE T.D. | CHOW E.M. | Issue Writer Certificate

Keywords

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Abstract

Cites

STUDY OF THERMO ELASTIC DAMPING IN AN ELECTROSTATICALLY DEFLECTED CIRCULAR MICRO-PLATE USING HYPERBOLIC HEAT CONDUCTION MODEL

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APA: Copy

YASUMURA, K.Y., STOWE, T.D., & CHOW, E.M.. (2000). QUALITY FACTORS IN MICRON- AND SUBMICRON-THICK CANTILEVERS. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 9(1), 117-125. SID. https://sid.ir/paper/599927/en

Vancouver: Copy

YASUMURA K.Y., STOWE T.D., CHOW E.M.. QUALITY FACTORS IN MICRON- AND SUBMICRON-THICK CANTILEVERS. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS[Internet]. 2000;9(1):117-125. Available from: https://sid.ir/paper/599927/en

IEEE: Copy

K.Y. YASUMURA, T.D. STOWE, and E.M. CHOW, “QUALITY FACTORS IN MICRON- AND SUBMICRON-THICK CANTILEVERS,” JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 9, no. 1, pp. 117–125, 2000, [Online]. Available: https://sid.ir/paper/599927/en

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