To illustrate the impact of variouse levels of irrigation water on grain yield and yield components of rice, a study was conducted based on randomized complete blocks as a split plot design with 3 replicates and 3 treatments for 2 years. Three depths of irrigation water including: Irrigation under 3.5cm water during growth period (I1), Irrigation under 2.2 cm water during growth period (h) and 0-1.5 cm above the soil surface (I3) were considered as main plots and 8 rice varieties (Geredeh mahali, Zayandeh-rud, Sazandegi, Hasani, 67-97, 67-113, 67-47 and 67-72) as subplots in a experimental site located in Shahid Fozveh Research Station. The treatments were compared based on yield grain, yield components and water Use Efficiency (WUE). Results showed that irrigation treatments had significant effects on sterility percent, plant height, panicle length, root length, dry root weight, and WUE (p£0.01). Significant differences (p£0.01) were observed in number of days until 50% of grain ripening, root lenght, dry root weight, plant height, panicle length, 1000 kernels, sterility percent, grain yield, seedlength, seed width, number of tiller, number of grain in panicle and WUE among the cultivars. Also cultivars had significant effect (p£0.05) on number of days until complete ripening. The highest WUE was measured 0.91 kg/m3 in h for Zayandeh-rud and for 67-113 and for Sazandegi the measured WUE were 0.86 and 0.85, respectively. Considering the importance of water consumption optimization as the main scope in arid and semi - arid lands of Iran, the treatment of I3 was recommended.