Low cost and simple fabrication of bi-material micro cantilever Array based on MEMS technology

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ABDOLLAHI HASSAN

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Journal: ELECTRONIC INDUSTRIES Year:2017 | Volume:8 | Issue:3 Page(s): 85-92

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Information Journal Paper

Title

Low cost and simple fabrication of bi-material micro cantilever Array based on MEMS technology

Author(s)

ABDOLLAHI HASSAN | Issue Writer Certificate

Keywords

bi-material micro cantileverQ1

MEMSQ1

bulk micromachiningQ1

Wet releaseQ1

Abstract

The purpose of this paper is designing a simple fabrication process to construct Al/SiO2 micro cantilever array based on bulk micro-machining technology. By the help of this process, bi-material cantilevers is implemented in a research laboratory with limited facilities. The results of this paper can be considered as the basis of designing and fabricating for Al/SiO2 micro cantilever sensors. Protection of Al in KOH, EDP and TMAH silicon etchant is the biggest technical problem of this type of micro cantilevers using bulk micromachining technique. In this method, Dual doped TMAH is used to fabricate micro cantilever. This process is realized with three single sides and one-double side lithography processes using two-chrome metal and one plastic transparent photomasks. Complexity of releasing the sacrificial layer is avoided using wet releasing of micro cantilever at ambient temperature. Then, Al/SiO2 micro cantilever array is fabricated with 50, 100, 150, 200, 250, 300, 350 and 400μ m lengths, 20 and 40μ m widths and 1μ m and 200nm thickness for SiO2 and Al, respectively.

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APA: Copy

ABDOLLAHI, HASSAN. (2017). Low cost and simple fabrication of bi-material micro cantilever Array based on MEMS technology. ELECTRONIC INDUSTRIES, 8(3 ), 85-92. SID. https://sid.ir/paper/229710/en

Vancouver: Copy

ABDOLLAHI HASSAN. Low cost and simple fabrication of bi-material micro cantilever Array based on MEMS technology. ELECTRONIC INDUSTRIES[Internet]. 2017;8(3 ):85-92. Available from: https://sid.ir/paper/229710/en

IEEE: Copy

HASSAN ABDOLLAHI, “Low cost and simple fabrication of bi-material micro cantilever Array based on MEMS technology,” ELECTRONIC INDUSTRIES, vol. 8, no. 3 , pp. 85–92, 2017, [Online]. Available: https://sid.ir/paper/229710/en

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