Improving SEM Imaging Performance by Using the Beam Deceleration Technique

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Mohebi morad Mina; KHOSRAVI MARYAM; Dehghani Gholamreza

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Journal Paper

Paper Information

Journal: IRANIAN JOURNAL OF LABORATORY KNOWLEDGE Year:2019 | Volume:7 | Issue:3 (27) Page(s): 13-19

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Title

Improving SEM Imaging Performance by Using the Beam Deceleration Technique

Author(s)

Mohebi morad Mina | KHOSRAVI MARYAM | Dehghani Gholamreza | Issue Writer Certificate

Keywords

Scanning Electron Microscope

Beam Deceleration

Backscattered Electrons

Cathode lens

Landing Energy

Abstract

Beam Deceleration is a relatively simple method to reduce electron beam energy and improve imaging parameters such as resolution and contrast. The Scanning Electron Microscope (SEM) uses a sharply focused electron beam to probe the specimen surface. The energy of the electrons forming such a probe is determined by the electrical potential of the electron source, referred to as accelerating voltage or high voltage (HV). No matter how many times the electrons are accelerated or decelerated inside the column, they leave the column with an energy corresponding to the high voltage. The high voltage is usually controllable within a range of 200 V to 30 kV for most commercially available SEMs, allowing the operator to select the electron beam energy suitable for the application. Imaging with very low electron beam energy has great importance, which is illustrated by SEM instrumentation development over the last few decades. Low voltage microscopy is a topic discussed at most microscopyrelated conferences these days, but generally, it is approached with an immersion lens and field emission gun (FEG) SEM system because of the better beam current densities. However, Beam Deceleration is also a means to bring low kV improvement to SEMs with thermionic electron sources.

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APA: Copy

Mohebi morad, Mina, KHOSRAVI, MARYAM, & Dehghani, Gholamreza. (2019). Improving SEM Imaging Performance by Using the Beam Deceleration Technique. IRANIAN JOURNAL OF LABORATORY KNOWLEDGE, 7(3 (27) ), 13-19. SID. https://sid.ir/paper/269046/en

Vancouver: Copy

Mohebi morad Mina, KHOSRAVI MARYAM, Dehghani Gholamreza. Improving SEM Imaging Performance by Using the Beam Deceleration Technique. IRANIAN JOURNAL OF LABORATORY KNOWLEDGE[Internet]. 2019;7(3 (27) ):13-19. Available from: https://sid.ir/paper/269046/en

IEEE: Copy

Mina Mohebi morad, MARYAM KHOSRAVI, and Gholamreza Dehghani, “Improving SEM Imaging Performance by Using the Beam Deceleration Technique,” IRANIAN JOURNAL OF LABORATORY KNOWLEDGE, vol. 7, no. 3 (27) , pp. 13–19, 2019, [Online]. Available: https://sid.ir/paper/269046/en

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